JPH0343581B2 - - Google Patents

Info

Publication number
JPH0343581B2
JPH0343581B2 JP56161441A JP16144181A JPH0343581B2 JP H0343581 B2 JPH0343581 B2 JP H0343581B2 JP 56161441 A JP56161441 A JP 56161441A JP 16144181 A JP16144181 A JP 16144181A JP H0343581 B2 JPH0343581 B2 JP H0343581B2
Authority
JP
Japan
Prior art keywords
light
photoelectric
signal
substrate
detection means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56161441A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5862544A (ja
Inventor
Shoichi Tanimoto
Kazunori Imamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nippon Kogaku KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Kogaku KK filed Critical Nippon Kogaku KK
Priority to JP16144181A priority Critical patent/JPS5862544A/ja
Priority to US06/343,552 priority patent/US4468120A/en
Publication of JPS5862544A publication Critical patent/JPS5862544A/ja
Publication of JPH0343581B2 publication Critical patent/JPH0343581B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP16144181A 1981-02-04 1981-10-09 欠陥検査装置 Granted JPS5862544A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16144181A JPS5862544A (ja) 1981-10-09 1981-10-09 欠陥検査装置
US06/343,552 US4468120A (en) 1981-02-04 1982-01-28 Foreign substance inspecting apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16144181A JPS5862544A (ja) 1981-10-09 1981-10-09 欠陥検査装置

Related Child Applications (2)

Application Number Title Priority Date Filing Date
JP63039615A Division JPS63241343A (ja) 1988-02-24 1988-02-24 欠陥検査装置
JP63039614A Division JPS63241342A (ja) 1988-02-24 1988-02-24 欠陥検査装置

Publications (2)

Publication Number Publication Date
JPS5862544A JPS5862544A (ja) 1983-04-14
JPH0343581B2 true JPH0343581B2 (en]) 1991-07-03

Family

ID=15735169

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16144181A Granted JPS5862544A (ja) 1981-02-04 1981-10-09 欠陥検査装置

Country Status (1)

Country Link
JP (1) JPS5862544A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61260632A (ja) * 1985-05-15 1986-11-18 Hitachi Ltd 異物検査装置
JP2512878B2 (ja) * 1987-01-29 1996-07-03 株式会社ニコン 異物検査装置
US5255089A (en) * 1992-03-26 1993-10-19 International Business Machines Corporation Portable particle detector assembly

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56115945A (en) * 1980-02-18 1981-09-11 Hitachi Electronics Eng Co Ltd Detecting device for defect of panel plate

Also Published As

Publication number Publication date
JPS5862544A (ja) 1983-04-14

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